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Advanced Yield Enhancement & Data Analysis System

Test & Defect Mapping


In the TYNE system the CP binning map is integrated with the defect data to produce an efficient "HIT/MISS" result, such that yield issues can be quickly understood & quantified.  TYNE mapping system allows you not only a simple wafer map view, it also provides the functions to overlay of any wafer/layer combination.  Use a mouse click to display the defect images as available.


AYEDAS

WAT Mapping

TYNE WAT mapping function enables the User to review the wafer maps of WAT measurement results. Multiple wafer selections allows you to review all selected wafer maps with one WAT parameter measurement result in one screen.  Alternatively you can display multiple wafer maps of each WAT parameter result .

 

 


The single wafer zoom in for better resolution is available by mouse click on that wafer map. 





AYEDAS


Shotgun Correlation Matrix

The most fundamental EDA capability is the ability to verify possible relations between Yield variables, Electrical test and key in-line parameters.  AYEDAS loads all data types (In-line, Defect, ETest, Wafer Test & Final Test) and allows the engineers to extract weeks of data (e.g. Yield) and correlate it against any data type. 

In some cases the user needs to search for potential correlations between several parameters.
AYEDAS Shotgun Correlation Matrix will significantly accelerate the analysis in these cases. 

Simply list those parameters you wish to correlate, the time period and a chart matrix will show all the input parameters on the diagonal and the correlation trend / coefficient of each parameter pair ( 1 to 1).

 



AYEDAS

Experiment Analysis


The continuous process improvement comes from the verified results of engineering trials. Therefore accurate and quick experimental analysis and results interpretation becomes essential for accelerating yield ramps.

AYEDAS Experiment Analysis allows all this to be done easily and automatically.  Simply input the experiment split condition / table, the output is then grouped by splits with the statistical results show you instantly how the each split performed.

Different output chart types are available to you when different issues are to be focused on.





AYEDAS

Generic Reporting

TYNE EDA serves all the typical statistical plots such as trends, capability plots, scatter charts, bar charts, box plots, pareto.  All of these generic charts are available as an option when you perform any one of the TYNE EDA functions .

Save the plots to a file for information sharing, re-scale the axis, edit plot title, add comments, etc. are available in all the TYNE EDA functions.  Alternatively save the extract as a batch job for automatic running every morning to be ready for you.


 
 
 
 



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TYNE Systems Corporation.
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