•TIME based batch system focused on
Process Monitoring.
•Purpose to rapidly review the
Health of Fab processes and Equipment.
•Predominately catering to the
Module and Defect Engineering communities.
•Web based, hierarchical viewer.
EDRS™
Maximising
EDA Productivity
EDRS is designed to smooth the demands on the
EDA systems, and eliminate Engineers spending
their valuable time generating routine trends.
Off shift the system generates the process
monitoring trends. Then, in the
morning, Engineers can review the latest
production status and react immediately.
EDRS processes All data sources including both Lot based and Equipment
based data collection and any customer
specific Pattern Recognition Data types.
The User initially selects the Data Area,
Products, etc. and the Time Period of
interest. Then the viewer displays all
the parameter trends for that data type.
EDRS™
The
15 minute Health Check
Once the ownership of the data is defined and the
analysis configured, 15 minutes is all it takes to
check the health of the line…
The station owners can focus on reviewing the key
trend charts, not generating them!
Should any abnormal trends be discovered, drilling
down to the next level to determine the contributory
steps and equipment.
CDFs (Cumulative Distribution Function
plots) give a highly visible indication of
the tool matching at each process step.
Drilling down to the final level (3in1)
clearly shows the statistical significance
of any abnormality or good performance.
EDRS™
System
Configuration
Batch job configuration and publishing
customisation is achieved through the EDRS GUI.
The System can highlight abnormal
lots in the batch trends; configure
which processes should be correlated
to which parameters, and even Users
can control which charts are to be
published in their own personal
environment.
TYNE Systems Corporation.
TEL:+886-3-5726781 FAX:+886-3-5737833
Maximising
EDA Productivity
