Advanced Yield Enhancement & Data Analysis System™
Test & AOI Mapping
In AYEDAS, Test, In-line and AOI maps are freely
available. Covering all 3 areas, Array, Colour Filter and
Cell, the mapping system allows single wafer map views as well
as composite maps views. It provides the functions to overlay any
batch / lot / glass/ panel / layer combination. In
addition the maps can be complimented with Defect code data, Grade
information as well as having the ability to sort the maps across process tools at any
Fab process step. Using the mouse, the User can
progressively 'drill down' from multiple lots display to the
individual panel & it provides the possibility to display the
defect images if available.
AYEDAS™
Shotgun
Correlation Matrix
The
most fundamental EDA capability is the ability to verify
possible relations between Yield variables, TEG test and key in-line parameters. AYEDAS loads all data
types (In-line, AOI, TEG, Array Test, CF & Cell) and
allows the engineers to extract weeks of data (e.g. Yield) and
correlate it against any data type.
In
some cases the user needs to search for potential correlations
between several parameters.
AYEDAS Shotgun Correlation Matrix will significantly
accelerate the analysis in these cases.
Simply list those parameters you wish to correlate, the
time period and a chart matrix
will show all the input parameters on the diagonal and
the correlation trend / coefficient of each parameter
pair ( 1 to 1).
AYEDAS™
Experiment
Analysis
The continuous process improvement comes from the
verified results of engineering trials. Therefore accurate
and quick experimental analysis and results interpretation becomes
essential for accelerating yield ramps.
AYEDAS Experiment Analysis allows all this to be
done easily and automatically. Simply input the experiment
split condition / table, the output is then grouped
by splits with the statistical results show you instantly
how the each split performed.
Different output chart types are available to you
when different issues are to be focused on.
AYEDAS™
Generic
Reporting
TYNE
EDA serves all the typical statistical plots such
as trends, capability plots, scatter charts, bar
charts, box plots, pareto. All of these generic
charts are available as an
option when you perform any one of the TYNE EDA functions
.
Save the plots to a file for information
sharing, re-scale the axis, edit plot title, add comments,
etc. are available in all the
TYNE EDA
functions. Alternatively save the extract as a batch
job for automatic running every morning to be ready
for you.
