Starting multiple EDA sessions is as simple as starting another
browser window. However
not all the sessions need to be just in the local Fab. If
the system is deployed in multiple locations, for example, a
local Integration engineer can compare the manufacturing Fab trends
vs. the development Fabs on another continent.
AYEDAS™
Customized
Data Filter
A
customized data filter gives both data extract functions combined
with multiple options how to analyze and display the results.
TYNE provides the User a customisable data selection interface that not just
fits into their daily operation environment but also engages the
efficiencies of a statistical methodology. Guaranteeing fast
output results and proper conclusions.
AYEDAS™
Analysis
Of Variance (ANOVA)
An
advanced statistical methodology Analysis Of Variance ( ANOVA)
had been applied in TYNE's EDA system. With ANOVA, the
variances and mean results from different process step tools will be tested
for differences and statistical significance.
The result gives you a clear and proven
matching / difference between groups of process step tools.
This empowers Users with a quick and accurate way of looking
for drifting process step tools and taking the corresponding
shutdown actions with confidence.
AYEDAS™
Cumulated
Distribution Function (CDF)
In today's semiconductor environment, process
and tools monitoring is essential to minimize variation and
maximize your process yields. TYNE employs a smart and efficient
analysis function, Cumulated Distribution Function (CDF)
chart matrix for each individual process step, and for each
variable (defect, yield, CD). Every colour trend in
each chart represents one tool at that operation step.
Significant differences can readily be found by looking for
divergences between the lines (tools) in the charts.
This
chart matrix gives you a quick daily overview on all the process
steps and tools, any drift at a particular process tool will
be seen and acted upon immediately. The health of the
line can be reviewed in minutes.
Additionally the individual graphs can be sorted
by Statistical significance or by process operation sequence
depending on the user preference.
Any
authorized users can easily access the web-based TYNE EDA System. Perform the analysis functions securely by simply activating
your WEB browser. The interactive User Interface offers the
user a quick function search of each individual Module. The
User can readily access the on line help documentation.
